產品介紹
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HS1 APERTURE
The HS1 Aperture is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 30, 50 or 70µm of range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications.
產品說明
The HS1 Aperture is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 30, 50 or 70µm of range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications.
Features :
- High speed, direct drive
- Stackable for XY or XYZ motion
- Diameter of the aperture : 33mm
- 30,50 or 70 µm motion
- Closed loop control
- Silicon sensor technology
- Less than 10pm noise floor
產品應用
Applications :
- Interferometry
- Nanolithography
- 3D polymerisation
- High speed focusing
- Adaptative optics
產品規格
Specifications :
| Unit | HS1.30 Aperture | HS1.50 Aperture | HS1.70 Aperture | |
| Range of motion | (µm) | 30 | 50 | 70 |
| Resolution | (nm) | 0,03 | 0,05 | 0,07 |
| Typical noise floor | (nm) | 0,003 | 0,005 | 0,007 |
| Full range repeatability | (nm) | 0,06 | 0,1 | 0,14 |
| Linearization (typical) | 0,02% | 0,02% | 0,02% | |
| Resonant frequency | (Hz) | 4000 | 4000 | 4000 |
| Stiffness | (N/µm) | 3 | 3 | 3 |
| Maximum load* : | ||||
| – horizontal use | (kg) | 1 | 1 | 1 |
| – vertical use | (kg) | 0,5 | 0,5 | 0,5 |
| Sensor | Silicon HR sensor | Silicon HR sensor | Silicon HR sensor | |
| Size W x L x H | (mm) | 62,5 x 96,1 x 12,6 | 62,5 x 116,1 x 12,6 | 62,5 x 138,1 x 12,6 |
| Material | Al | Al | Al | |
| Cable length | (m) | 2 | 2 | 2 |
| Controller | Standard or High Speed | Standard or High Speed | Standard or High Speed |
*Higher load on request