產品介紹
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FOCHS.100
The FOCHS.100 is a tubular design piezotage dedicated to microscope objective high speed nanopositioning. It is offered with 100 microns of travel. The FOCHS.100 is used in a wide range of applications : Z-stack, laser machining, autofocusing. It can work also together with automated focus stabilisation devices (for example, CRISP from ASI Imaging). It is made from aluminium, steel and brass. It is equipped with sensor offering stability in the picometer level.
產品說明
The FOCHS.100 is a tubular design piezotage dedicated to microscope objective high speed nanopositioning. It is offered with 100 microns of travel. The FOCHS.100 is used in a wide range of applications : Z-stack, laser machining, autofocusing. It can work also together with automated focus stabilisation devices (for example, CRISP from ASI Imaging). It is made from aluminium, steel and brass. It is equipped with sensor offering stability in the picometer level.
Features :
- 100 µm travel range
- High Speed
- Moves objectives with sub-nm resolution
- Parallel flexure guiding
- Closed loop control
- Silicon sensor technology
- Less than 10pm noise floor
產品應用
Applications :
- Interferometry
- Autofocus system
- 3D imaging
- Confocal microscopy
- Super resolution microscopy
- Semiconductor metrology
產品規格
Specifications :
| Unit | FOCHS.100 | |
| Range of motion | (µm) | 100 |
| Resolution | (nm) | 0,1 |
| Typical noise floor | (nm) | 0,01 |
| Full range repeatability | (nm) | 0,2 |
| Linearization (typical) | 0,02% | |
| Resonant frequency | (Hz) | 1 175 |
| Stiffness | (N/µm) | 3,5 |
| Maximum load* : | ||
| – horizontal use | (kg) | 0,5 |
| – vertical use | (kg) | 0,5 |
| Sensor | Silicon HR sensor | |
| Size Diameter x H | (mm) | Ø 65,5 x 50,3 |
| Material | Al | |
| Cable length | (m) | 2 |
| Controller | High Speed |
*Higher load on request