產品介紹
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FOC
The FOC are nanopositioners dedicated to microscope objective accurate positioning. They are offered with 100, 200 or 300 microns of travel. The FOC is used in a wide range of applications : Z-stack, automated focus or together with automated thermal expansion compensation (for example CRISP from ASI Imaging). It is made from aluminium and brass, and is equipped with sensor offering stability in the picometer level.
產品說明
The FOC are nanopositioners dedicated to microscope objective accurate positioning. They are offered with 100, 200 or 300 microns of travel. The FOC is used in a wide range of applications : Z-stack, automated focus or together with automated thermal expansion compensation (for example CRISP from ASI Imaging). It is made from aluminium and brass, and is equipped with sensor offering stability in the picometer level.
Features :
- Travel range up to 300 µm
- Moves objectives with sub-nm resolution
- Parallel flexure guiding
- Closed loop control
- Silicon sensor technology
- Less than 30pm noise floor
產品應用
Applications :
- Interferometry
- Autofocus system
- 3D imaging
- Confocal microscopy
- Super resolution microscopy
- Semiconductor metrology
產品規格
Specifications :
| Unit | FOC.100 | FOC.200 | FOC.300 | |
| Range of motion | (µm) | 100 | 200 | 300 |
| Resolution | (nm) | 0,1 | 0,2 | 0,3 |
| Typical noise floor | (nm) | 0,01 | 0,02 | 0,03 |
| Full range repeatability | (nm) | 0,2 | 0,4 | 0,6 |
| Linearization (typical) | 0,02% | 0,02% | 0,02% | |
| Resonant frequency | (Hz) | 500 | 350 | 250 |
| Stiffness | (N/µm) | 0,6 | 0,4 | 0,3 |
| Maximum load* : | ||||
| – horizontal use | (kg) | 0,5 | 0,5 | 0,5 |
| – vertical use | (kg) | 0,5 | 0,5 | 0,5 |
| Sensor | Silicon HR sensor | Silicon HR sensor | Silicon HR sensor | |
| Size W x L x H | (mm) | 53,6 x 64,2 x 34,5 | 53,6 x 64,2 x 34,5 | 53,6 x 64,2 x 34,5 |
| Material | Al | Al | Al | |
| Cable length | (m) | 2 | 2 | 2 |
| Controller | Standard | Standard | Standard |
*Higher load on request