產品介紹
-
-
SPM3
The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range of 75µm along X and Y with resonant frequencies higher than 2kHz on both axis. The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. Indeed, when used with the high power controller, the step response time of the Z axis of the SPM3.5 can be smaller than a millisecond. Hence, the SPM stage is designed for demanding metrology applications such as Atomic Force Microscopy.
產品說明
The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range of 75µm along X and Y with resonant frequencies higher than 2kHz on both axis.
The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. Indeed, when used with the high power controller, the step response time of the Z axis of the SPM3.5 can be smaller than a millisecond.
Hence, the SPM stage is designed for demanding metrology applications such as Atomic Force Microscopy.
Features :
- Ultra high speed
- All 3 axis are Direct drive
- 75 µm XY and up to 50µm Z travel range
- Closed loop control
- Silicon sensor technology
- Picometric noise floor
產品應用
Applications :
- Atomic Force Microscopy
- Scanning Probe Microscopy
- High speed and high resolution XYZ positioning
Exemple of use :
 |
 |
| Hybrid system with SPM3.50 | Customized system with SPM3.50 |
產品規格
Specifications :
| Unit | SPM3.5 | SPM3.10 | SPM3.25 | SPM3.50 | |
| Range of motion XY / Z | (µm) | 75 / 5 | 75 / 10 | 75 / 25 | 75 / 50 |
| Resolution XY / Z | (nm) | 0,075 / 0,005 | 0,075 / 0,01 | 0,075 / 0,025 | 0,075 / 0,05 |
| Typical noise floor XY / Z | (nm) | 0,0075 / 0,0005 | 0,0075 / 0,001 | 0,0075 / 0,0025 | 0,0075 / 0,005 |
| Full range repeatability XY / Z | (nm) | 0,15 / 0,01 | 0,15 / 0,02 | 0,15 / 0,05 | 0,15 / 0,1 |
| Linearization XYZ (typical) | 0,02% | 0,02% | 0,02% | 0,02% | |
| Resonant frequency X / Y / Z | (Hz) | 3000 / 2000 / 12 500 | 3000 / 2000 / 5 200 | 3000 / 2000 / 5 500 | 3000 / 2000 / 3 500 |
| Stiffness X / Y / Z | (N/µm) | 4 / 3 / 40,1 | 4 / 3 / 7,5 | 4 / 3 / 7,7 | 4 / 3 / 2,7 |
| Maximum load* : | |||||
| – horizontal use | (kg) | 0,1 | 0,1 | 0,1 | 0,1 |
| – vertical use (max torque) | (N.m) | 0,01 | 0,01 | 0,01 | 0,01 |
| Sensor | Silicon HR sensor | Silicon HR sensor | Silicon HR sensor | Silicon HR sensor | |
| Size W x L x H | (mm) | 120,9 x 120,9 x 32,5 | 120,9 x 120,9 x 32,5 | 120,9 x 120,9 x 49,3 | 120,9 x 120,9 x 69,3 |
| Material | Al | Al | Al | Al | |
| Cable length | (m) | 2 | 2 | 2 | 2 |
| Controller | High Speed | High Speed | High Speed | High Speed |
*Higher load on request