State-of-the-art sub 20 nm Fresnel zone plate (FZP) optics for X-ray focusing and microscopy applications, including phase contrast, ptychography, and general imaging in both soft and hard X-Ray regimes. Our zone plates are used in beamlines throughout the world utilizing traditional STXM (Scanning transmission X-ray microscopy), Transmission X-ray Microscope (TXM), as well as methods including  ptychography and phase contrast imaging.

SEM Image of hard X-Ray 25 nm resolution zone plate

Advantages
High Efficiency

Utilization of different metals (gold or nickel) allows for increased efficiency over a range of energies. Image generated from the ANT zone plate software.

Soft X-Ray Specification

X-rays below 5 keV (<~0.25 nm) are typically classified as soft X-rays, where they are more readily absorbed than higher energy X-rays. Typically, zone plates do not require the same thickness for efficiency and allow for higher resolution imaging.

Device	Outer Zone Width ΔRn(nm)	Thickness (µm)	Outer Diameter (µm)	(# of zones) E/ΔE Limit	~ Focal Length (µm)	Estimated Lead Time
NZP-50um-12nm	12	0.05 + 0.01	50	1059	144	Please Contact
NZP-65um-15nm	15		65	1096	235
SZP‑90um‑15nm	15	<0.1	90	1514	325	2-3
SZP‑120um‑15nm			120	2019	433
SZP‑200um‑18nm	18	<0.15	200	2797	868	In Stock
SZP‑270um‑18nm			270	3775	1172
SZP‑320um‑18nm			320	4473	1389
SZP-200um-25nm	25	<0.24	200	2007	1207	In Stock
SZP‑250um‑25nm			250	2509	1510
SZP-300um-25nm			300	3010	1811
SZP-360um-25nm			360	3612	2173
TZP‑160um‑50nm	50	<0.75	160	801	1934	2 – 3
TZP‑280um‑50nm			280	1401	3384
TZP‑750um‑200nm	200	<0.75	750	938	36292	1 – 3
TZP‑1250um‑200nm			1250	1563	60487
*For estimated efficiency of zone plate, please see generated graphs below or download our zone plate software.

Hard X-Ray Specification

X-Rays above 5-10 keV transition from tender to hard X-Rays where they are better able to penetrate through samples to give better imaging. Hard X-ray Fresnel zone plates require high aspect ratio features to offer sufficient efficiency and resolution for energies above 5 keV. Our current optics give ultra-high resolution for sub 25 nm – 100 nm imaging depending on the required energy. Stacking of hard X-rays (either through double processing or chip alignment) can significantly increase the efficiency of our devices.

A range of zone plate options for hard X-Rays are available for specific requirements.

Device	Outer Zone Width ΔRn(nm)	Thickness (µm)	Outer Diameter (µm)	(# of zones) E/ΔE Limit	Energy Range (keV)	Estimated Lead Time (months)
HZP-50-25nm	25	>0.65	50	500	1.5 to 10	2 – 3
HZP-75-25nm			75	750		2 – 3
HZP‑100um‑42.5nm	42.5	>0.8	100	588	2 to 12	2 – 3
HZP‑85um‑50nm	50	>0.9	85	425	2  to 12	2 – 3
HZPX‑85um‑50nm		>1.7			5.5 to 20	4 – 6
HZP‑180um‑50nm		>0.9	180	900	2 to 12	2 – 3
HZP‑550um‑50nm		>0.9	550	2750	2 to 12	2 – 3
HZPX‑550um‑50nm		>1.5			5.5 to 20	4 – 6
HZP-400um-100nm	100	>1.2	400	1000	2.5 to 8	2 – 3
HZPX‑400um‑100nm		>2.6			8 to 30	4 – 6
HZP‑400um‑120nm	120	>1.5	400	834	5 to 25	2 – 3
HZPX‑400um‑120nm		>2.6			8 to 30	4 – 5
HZP‑750um‑200nm	200	>2.2	750	938	7 to 20	3 – 4
HZPX‑750um‑200nm	200	>3.6			12 to 50	4 – 5
*For estimated efficiency of zone plate, please see generated graphs below or download our zone plate software. All zone plate diameters can be customized for specific setups. Standard frame sizes are 3 mm x 3 mm with SiN membranes (100 nm).

Central Stops

Central stop and outer blocker options significantly improve zone plate imaging, with reduction of the 0^th order and improved lifetime of the optics. Various Thicknesses up to 3 µm on chip are available or >10 µm as a separate chip.

4 um thick central stop electroplated on top of Fresnel zone plate with high resolution 18 nm outer zones

Custom designs and frame sizes

Custom designs and frame sizes can be developed for specific applications. We are able to fabricate devices down to 0.1 mm and below. Our standard frame sizes are 5 mm x 5 mm and membrane thickness can be down to 50 nm while the 100 nm thickness is ideal for energies above 5 keV. We also offer silicon carbide membranes for those requiring long-lifetime membranes.

Custom silicon nitride, silicon carbide or silicon membranes down to 0.9 mm half dimensions. Image above showing 1 cm x 1 cm (top), 5 mm x 5 mm (bottom left) and 0.9 mm x 5 mm chips.

Zone Plate Calculator
Applied Nanotools offers a free online zone plate calculating theoretical efficiencies and for calculating Fresnel zone plates parameters. Please see this link to visit the webpage: Zone Plate Calculator. For the legacy software please download here (note, this version is being replaced with the new website version).