永豐綦科技有限公司

Cutting-edge atomic force microscopy techniques
for large and multiple samples

General information

Ultimate imaging quality with build-in acoustic and vibration isolation, active thermostabilization, industry-best optical beam deflection sensor sensitivity and unique scanning-by-tip system design allowing routine high resolution imaging

Equipped with 50+ AFM modes including HybriD mode: all cutting-edge nanomechanical, electrical and magnetic studies are available in basic configuration

Smart ScanTronic™ algorithm for one-click optimization of scanning parameters allowing perfect topography measurements in tapping mode independently of researcher’s skills

Automated study of samples arrays by user-defined scenario with scanning point upload, ease-of-use software interface and database image storage

Up to 200×200 mm and 5 kg samples inspection in any point with 1 µm posotioning accuracy

Performance

Automated inspection of samples arrays on 200×200 mm area with ultimate positioning precision

> All routine procedures like area of interest exchange, laser alignment, gentle approach and scanning parameters tuning are fully automated
> 200×200 mm positioning range with micrometer accuracy and 8 mm/s speed
> Image storage database
> Smart software for automated serial measurements with customization upon your needs
> Scanning points coordinates upload
> Customizable easy exchange sample holders for variety of applications including wafer inspection, multiple samples study etc.

Perfect environment for high-resolution measurements: build-in acoustic&vibration isolation and thermal stabilization system

High-resolution measurements require exceptional level of acoustic and vibration isolation of AFM working environment. Build-in acoustic enclosure and active anti-vibration system makes VEGA perfect for demanding AFM studies.

Thermal drift is a challenging issue for high-resolution and long-term measurements especially for large-sample AFMs with massive mechanical parts. Tranfer of all heating parts out from working volume and build-in thermostabilizing system with 0.05 ^oC accuracy allow less than 10 nm/hour thermal drift.

Ultimate signal-to-noise ratio of optical beam deflection (OBD) sensor

850 nm non-coherent superluminiscent diode (SLD) source and special optical scheme design assures the lowest 25 fm/√HZ OBD sensor noise among commercial large-sample AFMs.

Low-noise closed-loop wide-range scanner

Our unique piezoscanner and control electronics design allow atomic resolution while saving wide, 100×100 μm scanning range.

HOPG atomic resolution

RMS height noise

Most advanced set of AFM modes in basic configuration

HybriD mode:

> Quantitative nanomechanical measurements (QNM) > Force volume > Conductivity mapping and piezoresponse force microscopy of soft samples > Simulations working with Kelvin probe force microscopy (KPFM), SCM or MFM

Self-assembled diphenylalanine peptide nanotubes: topography, adhesion, d²C/dZ², in-plane piezoresponse phase (direction of polarization), 8x8 µm

Multi-frequency electrical studies: > Single and double pass amplitude and phase modulation KPFM > Scanning capacitive microscopy (SCM): single and double pass C/dZ, dC/dV > Single and double pass amplitude and phase modulation KPFM+SCM > Single and double pass electrostatic force microscopy (EFM)

Topography, Surface Potential and dC/dZ of self-assembled F14H20 on Si, 1.5x1.5 µm

High-resolution magnetic force microscopy (MFM):

New CoFe Ethalon catilevers allows better than 30 nm MFM resolution and ultimate signal-to-noise ratio. Together with 200×200 mm XY motorized stage this makes VEGA a perfect tool for data storage inspection.

HDD servo sector,
10x10 µm

Full list of AFM modes avaliable in basic configuration:

Contact AFM: Topography, Lateral Force, Force Modulation, Spreading Resistance Imaging

Amplitude modulation AFM: Topography, Phase, Feedback

HybriD mode AFM: Topography, Young’s modulus, Work of Adhesion, Viscoelectisity, Conductivity, Piezoresponse force microscopy of Soft and loose samples, Fast Force Volume

AFM spectroscopy: Force-distance, Amplitude-distance, Phase-distance, I(V), I(Z)

Magnetic Force Microscopy: Two-pass DC/AC, Lift DC/AC

Electrostatic Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation, dC/dZ imaging, dC/dV imaging

Kelvin Probe Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Phase Modulation

Piezoresponse force microscopy & Switching Spectroscopy

Nanolithography: Voltage, Current, Force

High-resolution failure analysis and roughness measurements of large and heavyweight samples

200x200 mm XY motorized stage together with low-noise scanning-by-tip system and variety of unique NT-MDT SI AFM cantilevers allow failure and roughness analysis of large and heavyweight samples with 30 pm vertical resolution. This feature is now available for users of any skills thanks to automated scanning parameters adjustment.

Conventional AFM cantilever with 3:1 aspect ratio

NT-MDT wisker-type cantilever with >10:1 aspect ratio

Microporous nitrocellulose
membrane, obtained
by NT-MDT SI Whisker
type probe with 12:1
aspect ratio, 30x30 µm

Advanced studies in a field of microelectronics, MEMS and data storage

Magnetic domains
of high-density HDD

Surface potential of SRAM

Powerful set of surface characterization modes like Kelvin-probe, magnetic force, piezoresponce force microscopy, capacity and conductivity mapping makes VEGA AFM irreplaceable tool for research and control applications in a field of modern micro- and nanoelectronics, MEMS, NEMS and data storage.

Routine multiple AFM measurements

Mechanical design and control software of VEGA AFM was developed to make frequent AFM measurements easy and time-effective. Fully automated operation, user interface for serial AFM measurements, database image storage and customizable sample holder allow to setup and simply investigate any array of samples on 200×200 mm area.

DNA plasmids on MICA, 2x2 µm

PS-b-PMMA, 2.5x2.5 µm

Measuring heads

Standart AFM head for traditional AFM probes. Enables operation with the majority of commercial probes

Scanner

Type: tube scanner with closed loop sensors. Scanning by tip

Scanning range, XYZ: 100×100×10 µm or 2×2×1 µm in Low Voltage Mode

Closed loop: Available for all Directions: XYZ

Drive electronics noise <5 uV/√Hz

Tip-Sample Positioning

Type: motorized sample positioning in XYZ

XYZ thermal drift: Down to 0.2 nm/min

Moving range: 200×200 mm in XY, 30 mm in Z

Positioning accuracy: 1 µm in XY, 0.2 µm in Z

Positioning speed: 8 mm/sec in XY

Navigation: automated multiple scanning by user-defined scenario, by video image, 3D mouse compatible

Approach: smart soft approach algorithm

Optical Sensor

Light source: 850 nm LSD with FC single mode fiber, optional LDM and SLD sources of different wavelengths

Optical system adjustment: automated

Optical beam deflection sensor noise: <25 fm/√Hz above 50 kHz

Optical Microscope

Type: motorized focus, digital zoom and XY positioning. Correlated with sample and laser position

Resolution: 0,98 μm

Field of view: up to 1.2×0.8 mm (5 Mpixel)

Autofocus: on cantilever, on sample

Accessories

Variety of sample holders

+/- 150 V voltage extender

Signal access modul

AFM probes: probe holder supports most of commersially available probes

Electronics & Software

Number of scan channels: virtually unlimited

Signal processing: 512 Mb buffer Size, 3x 340 MHz
FPGA, 320 MHz DSP

Lock-in amplifiers: 2x analog lock-in amplifiers,
3x digital lock-in amplifiers (Multifrequency AFM
modes supporting)

Generators: 6x 32 bit digital generators, 4x for
Lock-in

BV: +/- 10 V AC and DC (independent sample and
tip voltage supply), +/- 150 V AC and DC (optional)

Self-testing: automated performance check

Scanning parameters autoadjustment: drive amplitude,
lock-in gain, setpoint, feedback gain, scanning rate.
Automatic configuration of advanced modes

Automation Features: optical system adjustment, multiple
scanning on 200×200 mm range by user-defined scenario,
overlay of optical and AFM images, panoramic optical view,
place of interest saving, autofocus on cantilever, autofocus
on sample

Programming tools: Nova PowerScript language, LabView
integration, Database integration

Database storage of obtained images

PC interface: USB

Instrument Isolation

Thermal stabilization: build-in temperature control
in acoustic enclosure with 0.05 ^oC accuracy

Acoustic isolation: build-in acoustic enclosur

Seismic isolation: build-in active vibration isolation
table

Basic Set of Modes

Contact mode: Topography, Lateral Force, Force
modulation,Spreading Resistance, Multifrequency
Piezo Force Microscopy,Contact Resonance Microscopy

Amplitude modulation mode: Topography, Phase Imaging,
Single and Double Pass Kelvin Probe Force Microscopy
with Phase and Amplitude Modulation, Double Pass and
Lift Magnetic Force Microscopy, Single and Double Pass Electrostatic Force Microscopy, Single and Double Pass
dC/dZ and dC/dV microscopy

HybriD mode: Topography, Elasticity modulus, Lift and
Land Adhesion, Work of Adhesion, Current, Piezoresponse, Viscoelasticity, Force Volume

Nanolithography: Voltage, Current, Force (All Vector and Raster)

Spectroscopy: Force-, Amplitude-, Phase-, Frequency-, Current-Distance, I(V), Piezopulse, Custom mode

Dimensions:

W×L×H: 810×610×1450 mm

產品介紹

VEGA

產品說明

General information

Performance

Most advanced set of AFM modes in basic configuration

產品應用

產品規格