The HS1 is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 10, 30, 50, 70 or 100 µm of range of motion and it can also be proposed with an aperture

 

Features :

• High speed, direct drive
• Stackable for XY or XYZ motion
• 10, 30, 50, 70 or 100 µm motion
• Closed loop control
• Silicon sensor technology
• Less than 10pm noise floor

Applications :

• Interferometry
• Nanolithography
• 3D polymerisation
• High speed focusing
• Adaptative optics

 

Exemple of use :

	Stacked HS-1.30 (2axis)
HS-1.70 on a RAMM	HS-1.30 with bracket for high speed focusing

Specifications :

	Unit	HS1.10	HS1.30	HS1.50	HS1.70	HS1.100
Range of motion	(µm)	10	30	50	70	100
Resolution	(nm)	0,01	0,03	0,05	0,07	0,1
Typical noise floor	(nm)	0,001	0,003	0,005	0,007	0,01
Full range repeatability	(nm)	0,02	0,06	0,1	0,14	0,2
Linearization (typical)		0,02%	0,02%	0,02%	0,02%	0,02%
Resonant frequency	(Hz)	7000	4000	4000	4000	1500
Stiffness	(N/µm)	5,2	3	3	3	1,1
Maximum load* :
– horizontal use	(kg)	1	1	1	1	1
– vertical use	(kg)	0,5	0,5	0,5	0,5	0,5
Sensor		Silicon HR sensor	Silicon HR sensor	Silicon HR sensor	Silicon HR sensor	Silicon HR sensor
Size W x L x H	(mm)	62,5 x 69,50 x 12,6	62,5 x 69,50 x 12,6	62,5 x 89,50 x 12,6	62,5 x 111,50 x 12,6	62,5 x 111,50 x 12,6
Material		Al	Al	Al	Al	Al
Cable length	(m)	2	2	2	2	2
Controller		Standard or High Speed	Standard or High Speed	Standard or High Speed	Standard or High Speed	Standard or High Speed

*Higher load on request