產品介紹
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The SLR.1500 is the longest travel range (1500 microns) piezostage that we offer in our product line. In comparison to other systems on the market, this stage is exceptionally reliable due to a totally frictionless assembly.
產品說明
The SLR.1500 is the longest travel range (1500 microns) piezostage that we offer in our product line.
In comparison to other systems on the market, this stage is exceptionally reliable due to a totally frictionless assembly.
Features :
- 300, 1500 µm motion
- Closed loop control
- Silicon sensor technology
- Less than 150pm noise floor
- Exceptionally reliable due to a frictionless assembly
產品應用
Applications :
- Research and Industry
- Nanolithography
- Adaptative optics
產品規格
Specifications :
| Unit | SLR.300 | SLR.1500 | ||
| Range of motion | (µm) | 300 | 1500 | |
| Resolution | (nm) | 0,3 | 1,5 | |
| Typical noise floor | (nm) | 0,03 | 0,15 | |
| Full range repeatability | (nm) | 0,6 | 3 | |
| Linearization (typical) | 0,02% | 0,02% | ||
| Resonant frequency | (Hz) | 745 | 135 | |
| Stiffness | (N/µm) | 0,35 | 0,15 | |
| Maximum load* : | ||||
| – horizontal use | (kg) | 1 | 1 | |
| – vertical use | (kg) | 0,5 | 0,5 | |
| Sensor | Silicon HR sensor | Silicon HR sensor | ||
| Size W x L x H | (mm) | 50x50x15 | 100 x 100 x 20,6 | |
| Material | Al | Al | ||
| Cable length | (m) | 2 | 2 | |
| Controller | Standard | Standard |
*Higher load on request