The LFHS2 is a 2-axis ultra-high speed nanopositioner, offering a motion range of 75µm along X and Y, a large 66mm x 66mm aperture and resonant frequencies higher than 2kHz on both axis.
Features :
Applications :
Exemple of use :
LFHS-2 with Z-STAGE.50 on a Manual Stage
Specifications :
Unit | LFHS2 | |||
Range of motion XY | (µm) | 75 | ||
Resolution | (nm) | 0,075 | ||
Typical noise floor | (nm) | 0,0075 | ||
Full range repeatability | (nm) | 0,15 | ||
Linearization (typical) | 0,02% | |||
Resonant frequency | (Hz) | 3000/2000 | ||
Stiffness | (N/µm) | 4/3 | ||
Maximum load* : | ||||
– horizontal use | (kg) | 1 | ||
– vertical use | (kg) | 0,5 | ||
Sensor | Silicon HR sensor | |||
Size W x L x H | (mm) | 120,8 x 120,7 x 28,5 | ||
Material | Al | |||
Cable length | (m) | 2 | ||
Controller | High Speed |
*Higher load on request