Lateral resolution below 1 nm.
For scanning small areas below 250 nm at 512 points. 1 nm radius tip Hi'Res-C |
Lateral resolution down to
5 nm for scan size below 1 μm. 8 nm radius trihedral silicon tip HQ:NSC, CSC & XSC |
Accurate resolution of surface
features larger than 10 nm in diameter. Good for scan sizes above 2 μm at 512 points. 20 nm radius hard DLC coated tips HARD |